High mobility and productivity of flexible In2O3 thin-film transistors on polyimide substrates via atmospheric pressure spatial atomic layer deposition

Kwang Su Yoo, Chi-Hoon Lee, Dong-Gyu Kim, Su‐Hwan Choi, Won-Bum Lee, Chang‐Kyun Park, Jin‐Seong Park

Applied Surface Science · 2023 · 19 citations · 37 references

Concepts

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