Nature Electronics · 2021 · 326 citations · 41 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsCarrier TransportOxide SemiconductorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsGate Oxide LeakageGate Oxide ScalingOxide Thin-film TransistorsThin Oxide FilmsThin-film Oxides
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