Concepedia

Electrical properties of amorphous Zn–Sn–O thin films depending on composition and post-deposition annealing temperature near crystallization temperature

Wha-Young Kim, Sukin Kang, Yonghee Lee, Sahngik Aaron Mun, Jinheon Choi, Sunjin Lee, Cheol Seong Hwang

Journal of Materials Chemistry C · 2023 · 18 citations · 14 references

DOIFull text

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Concepts

Abstract

This study investigated the crystallization and electrical properties of atomic layer deposited Zn–Sn–O (ZTO) thin films. Sn 42 at% ZTO thin film showed the best thermal stability and electrical properties due to a change in the sub-gap states.

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