Publication | Closed Access
Direct bonding of silicon nitride to copper via laser surface modification
24
Citations
25
References
2022
Year
Materials ScienceAdvanced Laser ProcessingEngineeringSurface ScienceApplied PhysicsLaser MaterialDirect BondingLaser Processing TechnologyLaser Surface ModificationLaser-assisted DepositionOptoelectronicsCladding (Metalworking)Silicon Nitride
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