Arc energy minimization in high-power impulse magnetron sputtering

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

Natural Sciences, Materials Science, Physics +7

High power impulse magnetron sputtering discharge

N. Brenning, Daniel Lundin, Ulf Helmersson · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 741 citations · Full text

Natural Sciences, Physics, Electronic Materials +14

High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering

André Anders, Joakim Andersson, Arutiun P. Ehiasarian · Journal of Applied Physics · 2007 · 345 citations · Full text

Natural Sciences, Materials Science, Physics +14

Target material pathways model for high power pulsed magnetron sputtering

D.J. Christie · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 290 citations

Natural Sciences, Materials Engineering, Materials Science +14

Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge

K. Macák, V. Kouznetsov, Jochen M. Schneider et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 275 citations

Natural Sciences, Materials Science, Physics +17