MEMS for Optical Functionality

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

A MEMS-based projection display

Peter F. Van Kessel, Larry J. Hornbeck, Reto Meier et al. · Proceedings of the IEEE · 1998 · 614 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Extending the travel range of analog-tuned electrostatic actuators

E.S. Hung, S.D. Senturia · Journal of Microelectromechanical Systems · 1999 · 443 citations

Engineering, Mechanical Engineering, Actuators +16

Low-threshold electrically pumped vertical-cavity surface-emitting microlasers

J. L. Jewell, Ya‐Ze Lee, Sarah J. Walker et al. · Electronics Letters · 1989 · 333 citations

Engineering, Electrical Engineering, Optoelectronics +15

Integrated optical chemical and direct biochemical sensors

W. Lukosz · Sensors and Actuators B Chemical · 1995 · 292 citations

Engineering, Chemical Engineering, Chemistry +14