Journal of Applied Crystallography · 2022 · 16 citations · 30 references
EngineeringMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsMicrofabricationStructural MaterialsDamage MechanicsFracture MechanicsFracture PropagationRadiation Damage In MaterialsX-ray CrystallographyX-ray DiffractionBrittle Fracture BehaviorCrack MorphologyIn-situ Deformation MeasurementSingle-crystal SiliconStrain Field MeasurementSynchrotron DiffractionSynchrotron X-ray DiffractionX-ray Diffraction Analysis
In situ investigations of cracks propagating at up to 2.5 km s −1 along an (001) plane of a silicon single crystal are reported, using X-ray diffraction megahertz imaging with intense and time-structured synchrotron radiation. The studied system is based on the Smart Cut process, where a buried layer in a material (typically Si) is weakened by microcracks and then used to drive a macroscopic crack (10 −1 m) in a plane parallel to the surface with minimal deviation (10 −9 m). A direct confirmation that the shape of the crack front is not affected by the distribution of the microcracks is provided. Instantaneous crack velocities over the centimetre-wide field of view were measured and showed an effect of local heating by the X-ray beam. The post-crack movements of the separated wafer parts could also be observed and explained using pneumatics and elasticity. A comprehensive view of controlled fracture propagation in a crystalline material is provided, paving the way for the in situ measurement of ultra-fast strain field propagation.
30
Silicon on insulator material technology
M. Bruel · Electronics Letters · 1995 · 1K citations
Low-speed fracture instabilities in a brittle crystal
James R. Kermode, Tristan Albaret, Dov Sherman et al. · Nature · 2008 · 224 citations
Basic mechanisms involved in the Smart-Cut® process
B. Aspar, M. Bruel, H. Moriceau et al. · Microelectronic Engineering · 1997 · 139 citations
Status and evolution of the ESRF beamline ID19
Timm Weitkamp, Paul Tafforeau, Elodie Boller et al. · AIP conference proceedings · 2010 · 125 citations
Natural Sciences, Biomedical Engineering, Biomedical Imaging +11