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Publication | Open Access

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

DOIFull Paper Access

13

Citations

17

References

2021

Year

Meiyi Wu, Jean‐François de Marneffe, Karl Opsomer, Christophe Detavernier, Annelies Delabie, Philipp Naujok, Özge Caner, Andy Goodyear, Mike Cooke, Qais Saadeh,
Micro and Nano Engineering

References

YearCitations

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