Meiyi Wu

Statistics

Publications

Citations

160

H-Index

Active since

2017

Affiliations

Laboratoire de Chimie Physique - Matière et Rayonnement(Current)

Sorbonne Université

Centre National de la Recherche Scientifique

Physikalisch-Technische Bundesanstalt

Tongji University

Meiyi Wu is an author at Laboratoire de Chimie Physique - Matière et Rayonnement specializing in natural sciences, materials science, and optical materials.

ORCID

Publications per year

2017–2023

Publications

Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

Qiushi Huang, Qi Jia, Jiangtao Feng et al. · Nature Communications · 2019 · 40 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +8

High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region

Qiushi Huang, Qiang Yi, Zhaodong Cao et al. · Scientific Reports · 2017 · 27 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Study of novel EUVL mask absorber candidates

Meiyi Wu, Devesh Thakare, Jean‐François de Marneffe et al. · Journal of Micro/Nanopatterning Materials and Metrology · 2021 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +15

Refined extreme ultraviolet mask stack model

Igor A. Makhotkin, Meiyi Wu, Victor Soltwisch et al. · Journal of the Optical Society of America A · 2021 · 14 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask

Meiyi Wu, Jean‐François de Marneffe, Karl Opsomer et al. · Micro and Nano Engineering · 2021 · 13 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

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