SiO2 as an insulator for SiC devices

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Electrochemical Charging of Thermal SiO2 Films by Injected Electron Currents

E. H. Nicollian, C. N. Berglund, Péter Schmidt et al. · Journal of Applied Physics · 1971 · 419 citations

Natural Sciences, Materials Engineering, Materials Science +17

Oxidation Kinetics of Silicon Carbide Crystals and Ceramics: I, In Dry Oxygen

J. A. Costello, Richard E. Tressler · Journal of the American Ceramic Society · 1986 · 366 citations

Natural Sciences, Materials Engineering, Materials Science +17

Comparative electron spectroscopic studies of surface segregation on SiC(0001) and SiC(0001)

L. Muehlhoff, W. J. Choyke, M. J. Bozack et al. · Journal of Applied Physics · 1986 · 283 citations

Natural Sciences, Materials Engineering, Materials Science +12

Band offsets and electronic structure of SiC/SiO2 interfaces

V. V. Afanas’ev, Gerhard Pensl, Max J. Schulz et al. · Journal of Applied Physics · 1996 · 268 citations

Natural Sciences, Materials Science, Physics +17