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Reactive ion etching of single crystal diamond by inductively coupled plasma: State of the art and catalog of recipes

DOIFull Paper Access

43

Citations

91

References

2020

Year

Adrien Toros, Marcell Kiss, Teodoro Graziosi, Sichen Mi, Riad Berrazouane, Mehdi Naamoun, Jelena Vukajlović Pleština, P. Gallo, Niels Quack
Diamond and Related Materials

References

YearCitations

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