Microsystem Technologies · 2019 · 25 citations · 17 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationMems DesignMems FabricationMems ModelingMems SimulationMems SwitchesRf MemsRf Mems SwitchesSwitch Fabrication ProcessesSwitch Modeling
17
Journal of the Franklin Institute · 1963 · 5.8K citations
Gabriel M. Rebeiz, Kamran Entesari, Isak C. Reines et al. · IEEE Microwave Magazine · 2009 · 309 citations
RF MEMS Satellite Switch Matrices
Mojgan Daneshmand, Raafat R. Mansour · IEEE Microwave Magazine · 2011 · 104 citations
Engineering, Aerospace Engineering, Electrical Engineering +16