Microsystem Technologies · 2016 · 65 citations · 11 references
EngineeringElectrical EngineeringElectromagneticsMicroelectromechanical SystemsMicroelectronicsMems DesignMems MaterialsMems ModelingMems SimulationMems SwitchesRf MemsCapacitive Mems SwitchesCapacitive Rf Mems SwitchesIsolationRf Mems SwitchesSwitch Simulation
11
Proceedings of the 36th European Microwave Conference
2006 · 363 citations
A packaged, high-lifetime ohmic MEMS RF switch
S. B. Majumder, J. Lampen, Rebecca Morrison et al. · 2003 · 105 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +16