IEEE Microwave Magazine · 2009 · 309 citations · 55 references
EngineeringElectrical EngineeringAntennasMicroelectronicsMicrowave EngineeringHigh-frequency Semiconductor DevicesMicrowave FiltersMicrowave Integrated CircuitsMicrowave Semiconductor DevicesReconfigurable AntennasRf MemsFiltersImpedance Matching NetworksPhase ShiftersPower ConsumptionReconfigurable FiltersRf Mems FiltersRf Mems Impedance Matching NetworksRf Mems Phase Shifters
RF MEMS technology was initially developed as a replacement for GaAs HEMT switches and p-i-n diodes for low-loss switching networks and X-band to mm-wave phase shifters. However, we have found that its very low loss properties (high device Q), its simple microwave circuit model and zero power consumption, its high power (voltage/current) handling capabilities, and its very low distortion properties, all make it the ideal tuning device for reconfigurable filters, antennas and impedance matching networks. In fact, reconfigurable networks are currently being funded at the same level-if not higher-than RF MEMS phase shifters, and in our opinion, are much more challenging for high-Q designs.
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Lifetime characterization of capacitive RF MEMS switches
C. Goldsmith, J. Ehmke, A. Malczewski et al. · 2002 · 341 citations