Frequency Modulated Mems Gyroscopes: Recent Developments, Challenges and Outlook

Abstract

After more than ten years of researches by different groups, this work summarizes the various frequency-modulated techniques for microelectromechanical system (MEMS) based gyroscopes. It then focuses on the low-power integrated electronics for Lissajous FM angular rate sensors and on the conditions to guarantee high offset stability over temperature. Recent results in terms of scale-factor drift and offset drift over temperature on the first complete Lissajous yaw FM gyroscope with full digital output are reported.