Concepedia

Determination of the oxygen content in amorphous SiOx thin films

A. O. Zamchiy, I. E. Merkulova, Sergey Khmel, E. A. Maximovskiy

Journal of Non-Crystalline Solids · 2019 · 31 citations · 43 references

DOI

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References

43

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

, , +17

Infrared spectroscopic study of SiO<i>x</i> films produced by plasma enhanced chemical vapor deposition

P. G. Pai, S. S. Chao, Yasuo Takagi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 799 citations

, , +17

Infrared absorption strength and hydrogen content of hydrogenated amorphous silicon

A. A. Langford, M. L. Fleet, B. P. Nelson et al. · Physical review. B, Condensed matter · 1992 · 625 citations

, , +17

Oxygen-bonding environments in glow-discharge-deposited amorphous silicon-hydrogen alloy films

G. Lucovsky, J. Yang, S. S. Chao et al. · Physical review. B, Condensed matter · 1983 · 432 citations

, , +17

XPS studies on SiOx thin films

R. Alfonsetti, L. Lozzi, M. Passacantando et al. · Applied Surface Science · 1993 · 340 citations

, , +7