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Synthesis of free-standing Ga <sub>2</sub> O <sub>3</sub> films for flexible devices by water etching of Sr <sub>3</sub> Al <sub>2</sub> O <sub>6</sub> sacrificial layers

Xia Wang, Zhenping Wu, Wei Cui, Yusong Zhi, Zhipeng Li, Peigang Li, Daoyou Guo, Weihua Tang

Chinese Physics B · 2019 · 16 citations · 36 references

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Abstract

Synthesis of free-standing Ga2O3 films for flexible devices by water etching of Sr3Al2O6 sacrificial layers* , Wang, Xia, Wu, Zhen-Ping, Cui, Wei, Zhi, Yu-Song, Li, Zhi-Peng, Li, Pei-Gang, Guo, Dao-You, Tang, Wei-Hua

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