Spectrochimica Acta Part B Atomic Spectroscopy · 2018 · 29 citations · 30 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSpectroscopyDevice CharacterizationDevice ReliabilityEtching ProcessesLaser SpectroscopyLaser Surface ProcessingSemiconductor ReliabilityBreakdown MechanismsLaser-induced BreakdownLaser-induced Breakdown SpectroscopyOptical BreakdownSilicon Wafer Processing
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Laser induced plasmas and applications
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Diego M. Díaz Pace, Cristian A. D'Angelo, D. Bertuccelli et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2006 · 157 citations
Natural Sciences, Materials Engineering, Materials Science +12