Micromachines · 2018 · 30 citations · 24 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsAmorphous SemiconductorsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor ReliabilitySemiconductor Thin FilmsThin-film TransistorsBias Stress EffectsBias Stress InstabilityLayer Thickness EffectsPassivation LayersReliability Degradation MechanismsSurface Passivation LayersThreshold VoltageThreshold Voltage Stability
Passivation (PV) layers could effectively improve the positive gate bias-stress (PGBS) stability of amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs), whereas the related physical mechanism remains unclear. In this study, SiO₂ or Al₂O₃ films with different thicknesses were used to passivate the a-IGZO TFTs, making the devices more stable during PGBS tests. With the increase in PV layer thickness, the PGBS stability of a-IGZO TFTs improved due to the stronger barrier effect of the PV layers. When the PV layer thickness was larger than the characteristic length, nearly no threshold voltage shift occurred, indicating that the ambient atmosphere effect rather than the charge trapping dominated the PGBS instability of a-IGZO TFTs in this study. The SiO₂ PV layers showed a better improvement effect than the Al₂O₃ because the former had a smaller characteristic length (~5 nm) than that of the Al₂O₃ PV layers (~10 nm).
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