Concepedia

Solution-processed amorphous ZrO <sub>2</sub> gate dielectric films synthesized by a non-hydrolytic sol–gel route

Jong‐Baek Seon, Nam-Kwang Cho, Gayeong Yoo, Youn Sang Kim, Kookheon Char

RSC Advances · 2018 · 20 citations · 22 references

Open access

Abstract

Solution-processed amorphous zirconium oxide (ZrO <sub>2</sub> ) dielectrics were formed <italic>via</italic> a non-hydrolytic sol–gel route at low-temperature. The ZrO <sub>2</sub> films exhibited a high dielectric constant and high mobility p-type pentacene TFTs were fabricated using them.

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