A Study on the Impact of Channel Mobility on Switching Performance of Vertical GaN MOSFETs

Abstract

This paper presents a comparison of switching performances between the in-situ oxide, gallium nitride (GaN) interlayer FET (OG-FET) and the conventional GaN metal-oxide-semiconductor FET (MOSFET), and explores the influence of the channel electron mobility on the device switching performance. GaN OG-FET is a novel structure with a pristine GaN layer grown between the gate oxide and the p-GaN enhancing the channel mobility up to 185 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /V· s, which is over 3× larger than that of the typical reported value (50 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /V · s) in GaN MOSFET. Owing to the high channel electron mobility, the GaN OG-FET showed a switching loss 30% lower than that of the conventional GaN trench MOSFET. Our results indicate that GaN OG-FET has the potential to attain greater efficiency, particularly at higher frequencies, showing a possible patch toward megahertz range conversions.