Design and research on large displacement bidirectional MEMS stage with interlock mechanism

Etch rates for micromachining processing

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Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator

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Single mask, large force, and large displacement electrostatic linear inchworm motors

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Analytical model for analysis and design of V-shaped thermal microactuators

Eniko T. Enikov, S. Kedar, Kalin V. Lazarov · Journal of Microelectromechanical Systems · 2005 · 132 citations

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Large-force electrothermal linear micromotors

John M. Maloney, D. Schreiber, Don L. DeVoe · Journal of Micromechanics and Microengineering · 2003 · 97 citations

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