Concepedia

Richard Yeh

RY

Statistics

Publications

8

Citations

526

H-Index

8

Active since

1995

Affiliations

University of California, Los Angeles(Current)

University of California, Berkeley

Richard Yeh is an author at University of California, Los Angeles specializing in microfabrication, engineering, and mechanical engineering.

Top concepts

EngineeringMicrofabricationMechanical SystemsMechanical EngineeringMechatronicsSoft RoboticsRoboticsMechanicsPropulsionMechanical Design

Publications per year

1995–2005

8

Publications

8

Single mask, large force, and large displacement electrostatic linear inchworm motors

Richard Yeh, S. Hollar, Kristofer S. J. Pister · Journal of Microelectromechanical Systems · 2002 · 142 citations

Engineering, Mechanical Engineering, Microactuator +17

Surface-micromachined components for articulated microrobots

Richard Yeh, E. Kruglick, Kristofer S. J. Pister · Journal of Microelectromechanical Systems · 1996 · 97 citations

Mechanical Couplings, Engineering, Mechanical Engineering +16

Controlled pulse-etching with xenon difluoride

Patrick Chu, Junlin Chen, Richard Yeh et al. · 2002 · 96 citations

Photonics, Engineering, Electron-beam Lithography +15

Gas-phase silicon micromachining with xenon difluoride

Floy I. Chang, Richard Yeh, G. Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 91 citations

Engineering, Simple Vacuum System, Vacuum Device +16

Design of low-power silicon articulated microrobots

Richard Yeh, S. Hollar, Kristofer S. J. Pister · Journal of Micromechatronics · 2001 · 28 citations

1–5 of 8