Concepedia

Floy I. Chang

FI

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Publications

1

Citations

91

H-Index

1

Active since

1995

Affiliations

University of California, Los Angeles(Current)

Floy I. Chang is an author at University of California, Los Angeles specializing in microfabrication, applied physics, and microfluidics.

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Publications per year

1995–1995

1

Publications

1

Gas-phase silicon micromachining with xenon difluoride

Floy I. Chang, Richard Yeh, G. Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 91 citations

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