Publication | Closed Access
A high stability and uniformity W micro hot plate
15
Citations
8
References
2018
Year
EngineeringMicrofabricationMechanicsMechanical EngineeringApplied PhysicsMicroscale SystemHeat TransferElectronic PackagingMicroelectronicsThermal EngineeringMicro-electromechanical SystemHigh StabilityMicrostructure
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