Materials Today Proceedings · 2018 · 18 citations · 16 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectromechanical SystemsMicroelectronicsMicrofabricationMaterial SelectionMems FabricationMems MaterialsMems SwitchesMicrofabrication MaterialsRf MemsOhmic Rf Mems SwitchesRf Mems SwitchesSwitch Contact ResistanceSwitch Fabrication ProcessesSwitch Modeling
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