Sensors and Actuators A Physical · 2001 · 218 citations · 8 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicrofabricationSemiconductor DevicesElectrostatic ActuationElectrostatic ActuatorsMems CharacterizationMems SwitchesMicromachiningSurface MicromachiningContact ResistanceContact Resistance MeasurementElectrical Contact ResistanceElectrostatic Actuation ModelingMeasurementMicroswitchesSwitch Contact ResistanceSwitch Modeling
8