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Vibration-assisted micro-ECM combined with polishing to machine 3D microcavities by using an electrolyte with suspended B4C particles

Materials ScienceEngineeringMicromachinesMachine 3DMicrofabricationMechanical EngineeringSuspended B4c ParticlesNano Electro Mechanical SystemBiomedical EngineeringMicroactuatorMicromachiningMicrofluidicsVibration-assisted Micro-ecm3D PrintingMicro-electromechanical System