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Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision

Electrical EngineeringEngineeringMicromachinesLithographical PrecisionMicrofabricationUltrashort Voltage Pulses–aMicromanufacturingMicroscale SystemBiomedical EngineeringPulse PowerMicromachiningElectrochemical MicromachiningMicroelectronicsMicro-electromechanical SystemMicro TechnologyElectrochemistry