Concepedia

Publication | Open Access

Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts

DOIFull Paper Access

24

Citations

27

References

2017

Year

Davit Melkonyan, Claudia Fleischmann, L. Arnoldi, J. Demeulemeester, Archana Praveen Kumar, Janusz Bogdanowicz, F. Vurpillot, Wilfried Vandervorst
Ultramicroscopy

References

YearCitations

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