A monolithic micro-optical interferometer deep etched into fused silica

Interspecimen Comparison of the Refractive Index of Fused Silica*,†

Irving H. Malitson · Journal of the Optical Society of America · 1965 · 4K citations

Optical Materials, Engineering, Optical Glass +18

Algorithm for the determination of intrinsic optical constants of metal films: application to aluminum

Aleksandar D. Rakić · Applied Optics · 1995 · 658 citations

Optical Materials, Engineering, Optical Testing +19

Deep dry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas

J. H. Park, Nae‐Eung Lee, Jae-Chan Lee et al. · Microelectronic Engineering · 2005 · 153 citations

Materials Engineering, Materials Science, Glass-ceramic +11

Highly efficient transmission gratings in fused silica for chirped-pulse amplification systems

T. Clausnitzer, Jens Limpert, Karsten Zöllner et al. · Applied Optics · 2003 · 137 citations

Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases

Li Li, Takashi Abe, Masayoshi Esashi · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 73 citations

Materials Engineering, Materials Science, Smooth Surface Glass +13