MEMS ion-sorption high vacuum pump

Abstract

In the article a miniature MEMS-type ion-sorption vacuum pump has been presented. The influence of electric and magnetic field, as well as horizontal and vertical dimensions of the micropump and type of material used for electrodes on the pump properties has been investigated. It has been found that the micropump works efficiently as long as the magnetic field is higher than 0.3 T, and pumping cell is larger than 1x1x1 mm3. The pump allows generating vacuum at the level of 10-7-10-9 hPa in 100 mm3 volume.