Tomasz Grzebyk

Publications

304

Citations

H-Index

2011

Active since

Affiliations

Wrocław University of Science and Technology(Current)

AGH University of Krakow

Tomasz Grzebyk is an author at Wrocław University of Science and Technology specializing in engineering, electrical engineering, and microfabrication.

ORCID

Top concepts

EngineeringElectrical EngineeringMicroelectronicsMicrofabricationApplied PhysicsInstrumentationVacuum Plasma TechnologyMicrofluidicsNanoelectronicsIon Propulsion

Publications per year

2011–2024

Publications

Glow-discharge ion-sorption micropump for vacuum MEMS

Tomasz Grzebyk, Anna Górecka-Drzazga, Jan Dziuban · Sensors and Actuators A Physical · 2014 · 51 citations

Electrical Engineering, Engineering, Microfabrication +6

MEMS type ionization vacuum sensor

Tomasz Grzebyk, Anna Górecka-Drzazga · Sensors and Actuators A Physical · 2016 · 36 citations

Electrical Engineering, Engineering, Sensors +5

MEMS ion-sorption high vacuum pump

Tomasz Grzebyk, Paweł Knapkiewicz, Piotr Szyszka et al. · Journal of Physics Conference Series · 2016 · 29 citations · Full text

Electrical Engineering, Engineering, Microfabrication +13

MEMS Vacuum Pumps

Tomasz Grzebyk · Journal of Microelectromechanical Systems · 2017 · 28 citations

Electrical Engineering, Engineering, Mems Vacuum Pumps +11

Field-emission electron source for vacuum micropump

Tomasz Grzebyk, Anna Górecka-Drzazga · Vacuum · 2011 · 17 citations

Vacuum Device, Vacuum Micropump, Physics

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1–5 of 17