Continuous Color Reflective Display Fabricated in Integrated MEMS-and-TFT-on-Glass Process

Abstract

The single mirror interferometric MEMS display is a full-color, daylight-visible, video-rate reflective display with high brightness that consumes power only during content updates. It consists of an array of identical pixels each of which can produce a continuous range of colors through precise analog positioning of one moving element, a mirror. Electrostatic actuation is driven with an integrated active-matrix backplane of indium-gallium-zinc oxide thin-film transistors. Displays of 384 × 384 pixels built on a surface micromachining process on glass substrates have been demonstrated on both 6-in wafers and Gen 4.5 panels (730 mm × 920 mm) showing good yield and uniformity.