Improvement of Fast and Precise Positioning of Large-Scale High-Precision Step-Stage Based on Vibration Suppression PTC

Abstract

In the positioning system of the large-scale high-precision step-stage, the primary resonance mode appears in low frequency even in the high stiffness stage. The resonance mode is a major obstacle of fast and precise positioning. In this paper, we apply vibration suppression PTC (perfect tracking control) which can control the resonance mode actively on the large- scale stage. Finally, simulations and experiments are performed to show the advantages of the vibration suppression PTC.