A piezoelectric bimorph micro-gripper with micro-force sensing

Abstract

A new piezoelectric bimorph micro-gripper with micro-force sensing is presented in the paper. The micro-gripper is based on the dual cantilevers structure and is driven by two piezoelectric bimorphs. Sticking two strain gauges on both sides of the base of the piezoelectric bimorph to sense free end transmutation of the bimorph, we can get displacement-voltage relationship and force-strain relationship respectively. As a result the gripper has the ability to detect micro-force when it is gripping micro-parts. The experiment results show that the gripper works reliably and safely. It is satisfied with the tasks of micro assembly.