Low temperature fabrication of high performance ZnO thin film transistors with high-k dielectrics

High-κ gate dielectrics: Current status and materials properties considerations

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Low-temperature fabrication of high-performance metal oxide thin-film electronics via combustion processing

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Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

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Fully Transparent ZnO Thin‐Film Transistor Produced at Room Temperature

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Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

Markus D. Groner, Jeffrey W. Elam, F. Fabreguette et al. · Thin Solid Films · 2002 · 724 citations

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