Concepedia

Publication | Closed Access

Dopant, composition and carrier profiling for 3D structures

DOI

45

Citations

67

References

2016

Year

Wilfried Vandervorst, Claudia Fleischmann, Janusz Bogdanowicz, Alexis Franquet, Umberto Celano, Kristof Paredis, A. Budrevich
Materials Science in Semiconductor Processing

References

YearCitations

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