In-line metrology of nanoscale features in semiconductor manufacturing systems

Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

D. Croft, G. Shed, Santosh Devasia · Journal of Dynamic Systems Measurement and Control · 1999 · 714 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +15

Anti-reflecting and photonic nanostructures

Surojit Chattopadhyay, Yi Huang, Yi‐Jun Jen et al. · Materials Science and Engineering R Reports · 2010 · 624 citations

Natural Sciences, Materials Science, Physics +12

Design and input-shaping control of a novel scanner for high-speed atomic force microscopy

Georg Schitter, Philipp J. Thurner, Paul K. Hansma · Mechatronics · 2008 · 209 citations

Engineering, Electrical Engineering, Physics +9

Design of a Large Range XY Nanopositioning System

Shorya Awtar, Gaurav Parmar · Journal of Mechanisms and Robotics · 2013 · 159 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

5×5 2D AFM cantilever arrays a first step towards a Terabit storage device

M. I. Lutwyche, C. Andreoli, G. Binnig et al. · Sensors and Actuators A Physical · 1999 · 115 citations

Engineering, Materials Engineering, Materials Science +10