Andrew Duenner

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Active since

2016

Affiliations

The University of Texas at Austin(Current)

Andrew Duenner is an author at The University of Texas at Austin specializing in industrial metrology, in-line metrology, and nanometer-scale metrology.

ORCID

Publications per year

2016–2016

Publications

In-line metrology of nanoscale features in semiconductor manufacturing systems

Tsung-Fu Yao, Andrew Duenner, Michael Cullinan · Precision Engineering · 2016 · 49 citations

Engineering, Manufacturing Engineering, Materials Science +16

In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

Tsung-Fu Yao, Andrew Duenner, Michael Cullinan · Journal of Micro and Nano-Manufacturing · 2016 · 19 citations

Engineering, Manufacturing Engineering, Metrology +16

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