Concepedia

A Two-Step Tunneling Model for the Stress Induced Leakage Current in Thin Silicon Dioxide Films

Naoki Yasuda, Nalin Patel, Akira Toriumi

1993 · 25 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor MaterialsThin FilmsDevice ModelingDevice SimulationQuantum TunnelingSemiconductor ReliabilitySilicon MaterialsThin Film Electrical PropertiesLeakage CurrentLeakage Current AnalysisLeakage Current ModelingSilicon DioxideStress-induced Leakage CurrentTunneling CurrentTunneling Phenomena