Applied Surface Science · 2016 · 27 citations · 21 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsEtching ProcessesSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor SurfacesSemiconductor Thin FilmsThin Film EtchingDevice FabricationEtch ChemistryEtch MechanismsEtchingGallium Nitride (Gan) Materials
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H. Föll, S. Langa, Jürgen Carstensen et al. · Advanced Materials · 2003 · 233 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17