Modeling and validation of acoustic performances of micro-acoustic sources for hearing applications

A new approach for the fabrication of micromechanical structures

M. Parameswaran, H. Baltes, Lj. Ristic et al. · Sensors and Actuators · 1989 · 128 citations

Engineering, Materials Science, Mechanical Engineering +14

A MEMS Condenser Microphone for Consumer Applications

J.W. Weigold, Tim Brosnihan, Joe Bergeron et al. · 2006 · 128 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

CMOS-MEMS membrane for audio-frequency acoustic actuation

John J. Neumann, K.J. Gabriel · Sensors and Actuators A Physical · 2002 · 108 citations

Engineering, Electrical Engineering, Physics +9

A high sensitivity polysilicon diaphragm condenser microphone

Po‐Chun Hsu, C.H. Klastrangelo, K.D. Wise · 2002 · 79 citations

Engineering, Physics, Acoustics +16

Hearing aids—Standards, options and limitations

Laura Ann Wilber · International Journal of Pediatric Otorhinolaryngology · 1996 · 71 citations

Health Professions, Audiology, Speech-language Pathology +12