Publication | Closed Access
CMOS-MEMS membrane for audio-frequency acoustic actuation
107
Citations
6
References
2002
Year
EngineeringMicrofabricationMechanical EngineeringNoiseAcoustic TweezerMicroelectronicsCmos-mems MembraneMicro-electromechanical SystemMicromachined Ultrasonic Transducer
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