Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate

Binh Tinh Tran, Hideki Hirayama, Noritoshi Maeda, Masafumi Jo, Shiro Toyoda, Norihiko Kamata

Scientific Reports · 2015 · 37 citations · 18 references

DOIFull text

Open access

References

18