Sub-wavelength printing in the deep ultra-violet region using Displacement Talbot Lithography

Rigorous coupled-wave analysis of planar-grating diffraction

M. G. Moharam, Thomas K. Gaylord · Journal of the Optical Society of America · 1981 · 2.2K citations

Natural Sciences, Physics, Computational Electromagnetics +16

Lithography gets extreme

Christian Wagner, Noreen Harned · Nature Photonics · 2009 · 623 citations

Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field

John A. Rogers, Kateri E. Paul, Rebecca J. Jackman et al. · Applied Physics Letters · 1997 · 293 citations

Engineering, Materials Engineering, Materials Science +13

Angle-Resolved Surface-Enhanced Raman Scattering on Metallic Nanostructured Plasmonic Crystals

Jeremy J. Baumberg, Timothy A. Kelf, Yoshihiro Sugawara et al. · Nano Letters · 2005 · 252 citations

Natural Sciences, Materials Science, Physics +16

Polarization independent visible color filter comprising an aluminum film with surface-plasmon enhanced transmission through a subwavelength array of holes

Daisuke Inoue, Atsushi Miura, Tsuyoshi Nomura et al. · Applied Physics Letters · 2011 · 230 citations

Natural Sciences, Materials Science, Physics +17