Room-temperature oxidation of silicon in the presence of Cu3Si

Formation of copper silicides from Cu(100)/Si(100) and Cu(111)/Si(111) structures

Chin‐An Chang · Journal of Applied Physics · 1990 · 251 citations

Engineering, Materials Engineering, Materials Science +14

Formation, oxidation, electronic, and electrical properties of copper silicides

A. Cros, M. O. Aboelfotoh, K. N. Tu · Journal of Applied Physics · 1990 · 204 citations

Engineering, Materials Science, Physics +17

Transmission electron microscopy of cross sections of large scale integrated circuits

T. T. Sheng, Chyh-Yih Chang · IEEE Transactions on Electron Devices · 1976 · 138 citations

Engineering, Electrical Engineering, Materials Science +15

7 × 7 Si(111)Cu interfaces: Combined LEED, AES and EELS measurements

E. Daugy, P. Mathiez, F. Salvan et al. · Surface Science · 1985 · 105 citations

Natural Sciences, Materials Science, Physics +11

The formation of Cu3Si: Marker experiments

Lars Stolt, F. M. d’Heurle · Thin Solid Films · 1990 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +5