Publication | Closed Access
Deposition and microhardness of SiC from the Si2Cl6-C3H8-H2-Ar system
19
Citations
18
References
1986
Year
Materials ScienceMaterials EngineeringEngineeringApplied PhysicsCarbideSemiconductor Device FabricationSilicon On InsulatorSi2cl6-c3h8-h2-ar SystemMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1