Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu

Yujin Jang, Jun Beom Kim, Tae Eun Hong, So Jeong Yeo, Sun-Ju Lee, Eun Ae Jung, Bo Keun Park, Taek‐Mo Chung, Chang Gyoun Kim, Do-Joong Lee,

Journal of Alloys and Compounds · 2015 · 49 citations · 32 references

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