Do-Joong Lee

Sub-10-nm Nanochannels by Self-Sealing and Self-Limiting Atomic Layer Deposition

Sung‐Wook Nam, Min‐Hyun Lee, Seunghyun Lee et al. · Nano Letters · 2010 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +13

Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

Sung-Soo Yim, Do-Joong Lee, Ki-Su Kim et al. · Journal of Applied Physics · 2008 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +17

Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu

Yujin Jang, Jun Beom Kim, Tae Eun Hong et al. · Journal of Alloys and Compounds · 2015 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +9

Infrared and microwave shielding of transparent Al-doped ZnO superlattice grown via atomic layer deposition

Gustavo E. Fernandes, Do-Joong Lee, Jin Ho Kim et al. · Journal of Materials Science · 2012 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +14

Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen

Seungmin Yeo, Jiyoon Park, Seung‐Joon Lee et al. · Microelectronic Engineering · 2015 · 37 citations

Natural Sciences, Chemistry, Materials Science +11