Do-Joong Lee

Sub-10-nm Nanochannels by Self-Sealing and Self-Limiting Atomic Layer Deposition

Sung‐Wook Nam, Min‐Hyun Lee, Seunghyun Lee et al. · Nano Letters · 2010 · 80 citations

Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

Sung-Soo Yim, Do-Joong Lee, Ki-Su Kim et al. · Journal of Applied Physics · 2008 · 79 citations

Engineering, Crystal Growth Technology, Solid-state Chemistry +17

Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu

Yujin Jang, Jun Beom Kim, Tae Eun Hong et al. · Journal of Alloys and Compounds · 2015 · 46 citations

Materials Science, Engineering, Nanomaterials +8

Infrared and microwave shielding of transparent Al-doped ZnO superlattice grown via atomic layer deposition

Gustavo E. Fernandes, Do-Joong Lee, Jin Ho Kim et al. · Journal of Materials Science · 2012 · 38 citations

Materials Science, Aluminium Nitride, Ii-vi Semiconductor +4

Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen

Seungmin Yeo, Jiyoon Park, Seung‐Joon Lee et al. · Microelectronic Engineering · 2015 · 35 citations

Materials Science, Inorganic Chemistry, Transition Metal Chalcogenides +10